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  • Research data for: Atomic-Scale Pathway from Coherently Embedded Sc-rich…

Research data for: Atomic-Scale Pathway from Coherently Embedded Sc-rich Defects to Cubic ScN Precipitates in MOCVD-Grown Al0.87Sc0.13N Thin Films

This dataset contains STEM / EDX / EELS raw data used for analysis of lattice parameters and spectra.

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Date Created:
23.09.2026
Date of recording:
23.09.2026
Date Issued:
23.09.2026
Date Modified:
23.09.2026
DOI:
10.57892/100-372
Language:
English
Type of Resource:
Data Set
Project:
Deutsche Forschungsgemeinschaft
Grenzen der Schaltfestigkeit in ferroelektrischen Nitriden: Fortschrittliche analytische Methoden für ermüdungsfreie AlScN-Bauteile [563148605]
Geographic:
Technische Fakultät, CAU Kiel
Keywords:
  1. Transmission Electron Microscopy
    Type
    Topic
DDC subject of DNB:
530 Physics
Hosting institution:
Faculties, Faculty of Engineering
Dates covered
2025 to 2026

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CC BY-SA 4.0