@Misc{fdr_mods_00000372,
  author = 	{Dieball, Ella Josefine
		and Sch{\"o}nweger, Georg
		and Streicher, Isabel
		and Leone, Stefano
		and Kienle, Lorenz
		and Wolff, Niklas},
  title = 	{Research data for: Atomic-Scale Pathway from Coherently Embedded Sc-rich Defects to Cubic ScN Precipitates in MOCVD-Grown Al0.87Sc0.13N Thin Films},
  year = 	{2026},
  month = 	{Sep},
  day = 	{23},
  keywords = 	{Transmission Electron Microscopy; Technische Fakult{\"a}t, CAU Kiel},
  abstract = 	{This dataset contains STEM / EDX / EELS raw data used for analysis of lattice parameters and spectra.},
  doi = 	{10.57892/100-372},
  url = 	{https://opendata.uni-kiel.de/receive/fdr_mods_00000372},
  url = 	{https://doi.org/10.57892/100-372},
  file = 	{:https://opendata.uni-kiel.de/servlets/MCRFileNodeServlet/fdr_derivate_00000370/Shared%20raw%20data.zip:TYPE},
  language = 	{en}
}