PT Unknown
AU Dieball, EJ
   Schönweger, G
   Streicher, I
   Leone, S
   Kienle, L
   Wolff, N
TI Research data for: Atomic-Scale Pathway from Coherently Embedded Sc-rich Defects to Cubic ScN Precipitates in MOCVD-Grown Al0.87Sc0.13N Thin Films
PD September
PY 2026
DI 10.57892/100-372
WP https://opendata.uni-kiel.de/receive/fdr_mods_00000372
LA en
DE Transmission Electron Microscopy; Technische Fakultät, CAU Kiel
AB This dataset contains STEM / EDX / EELS raw data used for analysis of lattice parameters and spectra.
ER