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<dc:title>Research data for: Atomic-Scale Pathway from Coherently Embedded Sc-rich Defects to Cubic ScN Precipitates in MOCVD-Grown Al0.87Sc0.13N Thin Films</dc:title>
<dc:creator>Dieball, Ella Josefine</dc:creator>
<dc:creator>Schönweger, Georg</dc:creator>
<dc:creator>Streicher, Isabel</dc:creator>
<dc:creator>Leone, Stefano</dc:creator>
<dc:creator>Kienle, Lorenz</dc:creator>
<dc:creator>Wolff, Niklas</dc:creator>
<dc:type>research_data</dc:type>
<dc:type>database</dc:type>
<dc:identifier>https://doi.org/10.57892/100-372</dc:identifier>
<dc:identifier>https://opendata.uni-kiel.de/receive/fdr_mods_00000372</dc:identifier>
<dc:identifier>https://opendata.uni-kiel.de/receive/fdr_mods_00000372</dc:identifier>
<dc:type>doc-type:ResearchData</dc:type>
<dc:subject>ddc:530</dc:subject>
<dc:subject/>
<dc:coverage>2025/2026</dc:coverage>
<dc:subject>Transmission Electron Microscopy</dc:subject>
<dc:subject/>
<dc:coverage>Technische Fakultät, CAU Kiel</dc:coverage>
<dc:description>This dataset contains STEM / EDX / EELS raw data used for analysis of lattice parameters and spectra.</dc:description>
<dc:date>2026-09-23</dc:date>
<dc:language>eng</dc:language>
<dc:rights>https://creativecommons.org/licenses/by-sa/4.0/</dc:rights>
<dc:rights>Fulltext available at https://opendata.uni-kiel.de/receive/fdr_mods_00000372https://opendata.uni-kiel.de/servlets/MCRFileNodeServlet/fdr_derivate_00000370/Shared%20raw%20data.ziphttps://opendata.uni-kiel.de/rsc/thumbnail/fdr_mods_00000372.png
          
          
            Research data for: Atomic-Scale Pathway from Coherently Embedded Sc-rich Defects to Cubic ScN Precipitates in MOCVD-Grown Al0.87Sc0.13N Thin Films
          
          
            
              his
            Host institution
          
          
            Dieball, Ella Josefine
            
              aut
            Author
            
            0009-0002-4223-0739
            Dieball
            Ella
            Josefine
          
          
            Schönweger, Georg
            
              aut
            Author
            0000-0001-9798-1834
            Schönweger
            Georg
          
          
            Streicher, Isabel
            
              aut
            Author
            133813633X
            0000-0003-3653-0401
            Streicher
            Isabel
          
          
            Leone, Stefano
            
              aut
            Author
            127606764X
            161050263
            0000-0003-4579-3529
            Leone
            Stefano
          
          
            
              aut
            Author
            Kienle, Lorenz
            
            Kienle
            Lorenz
          
          
            Wolff, Niklas
            
              aut
            Author
            0000-0002-8796-0607
            
            Wolff
            Niklas
          
          
            2026-09-23
          
          
          
          database
          
            2026-09-23
          
          
            2026-09-23
          
          
            2026-09-23
          
          
            2025
            2026
          20252026
          
            en
          
          
          This dataset contains STEM / EDX / EELS raw data used for analysis of lattice parameters and spectra.
          
            Transmission Electron Microscopy
          
          
            Technische Fakultät, CAU Kiel
          
          530
          
          2026-10-05
          
            
          
          10.57892/100-372
          data set
        fdr_mods_00000372https://opendata.uni-kiel.de/receive/fdr_mods_00000372</dc:rights>
<dc:rights>info:eu-repo/semantics/embargoedAccess</dc:rights>
</oai_dc:dc>