https://opendata.uni-kiel.de/receive/fdr_mods_00000372 https://opendata.uni-kiel.de/servlets/MCRFileNodeServlet/fdr_derivate_00000370/Shared%20raw%20data.zip https://opendata.uni-kiel.de/rsc/thumbnail/fdr_mods_00000372.png Research data for: Atomic-Scale Pathway from Coherently Embedded Sc-rich Defects to Cubic ScN Precipitates in MOCVD-Grown Al0.87Sc0.13N Thin Films his Host institution Dieball, Ella Josefine aut Author 0009-0002-4223-0739 Dieball Ella Josefine Schönweger, Georg aut Author 0000-0001-9798-1834 Schönweger Georg Streicher, Isabel aut Author 133813633X 0000-0003-3653-0401 Streicher Isabel Leone, Stefano aut Author 127606764X 161050263 0000-0003-4579-3529 Leone Stefano aut Author Kienle, Lorenz Kienle Lorenz Wolff, Niklas aut Author 0000-0002-8796-0607 Wolff Niklas 2026-09-23 database 2026-09-23 2026-09-23 2026-09-23 2025 2026 2025 2026 en This dataset contains STEM / EDX / EELS raw data used for analysis of lattice parameters and spectra. Transmission Electron Microscopy Technische Fakultät, CAU Kiel 530 2026-10-05 10.57892/100-372 data set fdr_mods_00000372 https://opendata.uni-kiel.de/receive/fdr_mods_00000372