Supplemental material to 'Analysing dust particle size and size distribution on extracted particles by SEM and comparing with light scattering techniques'

10.57892/100-52Petersen, AndreasAndreasPetersen0000-0002-8620-1027Supplemental material to 'Analysing dust particle size and size distribution on extracted particles by SEM and comparing with light scattering techniques'Kiel University2024dust, extraction, particle-size distribution, plasma polymerization, scanning electron microscopy (SEM)530Kiel UniversityGreiner, FrankoFrankoGreiner0000-0002-4828-3770Wötzel, JakobJakobWötzel2024-04-17enresearch_datahttps://opendata.uni-kiel.de/receive/fdr_mods_00000052fdr_mods_00000052https://opendata.uni-kiel.de/receive/fdr_mods_00000052?XSL.Transformer=modsODbL 1.0 - Open Database LicenseThe presented data is supplemental material to the publication 'Analysing dust particle size and size distribution on extracted particles by SEM and comparing with light scattering techniques' (DOI: 10.1002/ppap.202400032) in Plasma Processes and Polymers published by Wiley‐VCH GmbH. The article describes six nearly identical cycles (numbered Set_1-6). In each amorphous hydrogenated carbon nanoparticles formed in a low temperature, low pressure discharge by plasma polymerization. The growth of the particles was monitored and eight consecutive samples per cycle were taken (numbered Extraction_1-8). For each sample scanning electron microscopy images of parts (Part_1-x) of the sample wafers were taken at a fixed magnification of 3000, which equals 12.4 nm per pixel. These images make up the first part . In a next step the particles were identified with the Hough transform-based routine , which is part of . The resulting data is stored in the second part . Lastly, from this analysis the particle size distribution (PSD) is modeled as a normal distribution. While in the publication a subset is presented for discussion, here the full histogram set can be accessed. It is found in